Wafer & substrate cleaning
High-pressure pure-water supply for spray and rinsing stages in semiconductor wet-process equipment. Define the nozzle duty and process water acceptance criteria when selecting the configuration.
HPT SERIES PUMPS · PURE WATER APPLICATIONS
Oil-free, water-lubricated axial piston pumps for semiconductor cleaning, high-pressure rinsing and OEM pure-water equipment.
Match the pump, motor and drive to your required pressure, flow and water specification. Rohre HPT Series Pumps cover compact cleaning duties through larger high-pressure water systems.
PRESSURE FOR PRECISION CLEANING
High-pressure pure-water supply for spray and rinsing stages in semiconductor wet-process equipment. Define the nozzle duty and process water acceptance criteria when selecting the configuration.
Pump selection for polishing-pad rinsing and post-CMP cleaning systems, including continuous operation or specified start-stop cycles.
Compact axial piston pumps for precision cleaning of equipment parts and high-purity water systems, with motor and drive options matched to the machine.
SELECT THE DUTY, THEN THE MODEL
Use this family overview to narrow your selection. Flow is selected at the required pressure and shaft speed; displacement is a geometric value, not the delivered flow.
| Pump family | Displacement cm³/rev | Outlet pressure barg | Speed range rpm | Housing | Water temperature |
|---|---|---|---|---|---|
| HPT 2.0 / 3.2 / 4.0 / 6.3 | 2 / 3.2 / 4 / 6.3 | 10–100 | 1,000–3,000 | SS304 | 2–50°C |
| HPT 10 / 12.5 | 10 / 12.5 | 10–100 | 1,000–2,400 | SS304 | 2–50°C |
| HPT 20 / 25 / 32 | 20 / 25 / 32 | 30–100 | 1,000–2,400 | SS316 | 2–50°C |
| HPT 50 / 70 / 80 / 90 | 50 / 70 / 80 / 90 | HPT 50: 30–80 HPT 70–90: 30–100 | 1,000–1,800 | SS316 | 2–50°C |
barg = gauge pressure. 100 bar = 10 MPa. Housing grade does not describe every wetted component. Confirm the full wetted-material and seal specification for your process.
Catalogue flow values below apply at 100 bar and 1,500 rpm. They are a reference operating point, not the full flow range of each model.
| Model | HPT 2.0 | HPT 3.2 | HPT 4.0 | HPT 6.3 | HPT 10 | HPT 12.5 |
|---|---|---|---|---|---|---|
| Flow · L/min | 1.7 | 3.6 | 5.0 | 8.6 | 12.6 | 16.5 |
| Flow · L/h | 102 | 216 | 300 | 516 | 756 | 990 |
The proposed duty point, motor power and allowed speed range are confirmed together during selection. Ask for the drawing and performance data for your selected model.
DESIGNED INTO YOUR EQUIPMENT
Provide the water source, resistivity or conductivity, temperature, particle limits and any restrictions on metals, elastomers or plastics. Wetted-material compatibility and process acceptance must be checked for the complete fluid path.
HPT pumps are not self-priming. Provide a stable, flooded inlet and confirm available pressure and flow at the pump, including filter and piping losses. Bleed trapped air before starting.
Specify voltage, frequency, phases and the running cycle. A variable frequency drive can adjust the pump speed within its permitted range. Include starts per hour and minimum running time for intermittent duty.
Confirm pump ports, shaft, coupling, bell housing, motor flange and installation space. For replacement enquiries, send the existing pump code and dimensional drawing so the proposed interfaces can be checked.
FROM PUMP TO PACKAGE
Bring the pump, electric motor, coupling and application-specific controls into one defined supply scope. Discuss filtration, pressure monitoring, relief protection and the interface to your nozzle system.
Constant-speed and variable-speed configurations are selected around the actual spray duty and water quality.
Explore Plug and Spray UnitHPT 50 is listed at a maximum outlet pressure of 80 barg. The other models in the overview are listed at 100 barg. Use the rating of the selected model and confirm the complete system pressure limits.
Send the original model and product code, required flow and pressure, motor details and installation drawing. We check hydraulic performance and mechanical interfaces for the proposed configuration; an alternative model is not automatically a drop-in replacement.
Tell us the power supply, speed-control requirements and operating cycle. The quotation can define the pump, motor, drive, coupling, bell housing and connection accessories as applicable.
TELL US YOUR OPERATING POINT
Send flow and pressure, water specification, inlet conditions, temperature, power supply and operating cycle. Add your existing pump nameplate or drawing for a replacement enquiry.