Rohre has supplied HPU ultrapure water pumps for a semiconductor application at 7 MPa with frequent starts and stops. The customer specified three flow ranges: 0.83–3.4, 3–10 and 8–20 L/min. We matched these requirements to HPU 2.0, HPU 4.0 and HPU 10, respectively.
If you are choosing an ultrapure water pump for PAD rinsing or assessing a Danfoss alternative, the examples below give you a closer look at the HPU range: actual application requirements, model selection and the components supplied with a pump package. That makes it easier to compare a proposed pump—and its quotation—with what you need.
Selecting the pump from your required flow and pressure
We start with the flow, operating pressure and medium you specify. We then check the pump’s available flow at the required pressure, the corresponding speed and the applicable operating limits. Water temperature, inlet pressure and material requirements complete the initial pump selection.
If you supply the motor, please include its rated speed and mounting details. If you need us to supply the motor and drive, provide the electrical supply and operating requirements so we can match the package. The same information is used for our other high-pressure cleaning pump enquiries.
Case 1: an HPU 12.5 ultrapure-water package for semiconductor equipment
This project required an ultrapure-water pump package for semiconductor equipment. The specification gives a normal operating point of 16 L/min at 10 MPa, with 20 L/min as the maximum design flow target. The stated normal operating mode is continuous operation with variable-speed flow control.
The HPU 12.5 was specified with the motor, VFD, coupling, bell housing and adapter connections listed below.
| Item | HPU 12.5 project configuration |
|---|---|
| Medium and application | Ultrapure water for semiconductor equipment |
| Normal operating pressure specified for this project | 10 MPa (100 bar) |
| Normal operating flow specified for this project | 16 L/min (960 L/h) |
| Maximum design flow target | 20 L/min (1200 L/h) |
| Maximum permitted outlet pressure | 10 MPa (100 bar) |
| Normal operating mode | Continuous operation; variable-speed flow control |
| Pump body | SS304 |
| Specified flow-contacting components | 2507 |
| Motor | 7.5 kW INNOMOTICS |
| Motor rated supply | 380 V, three-phase, 50 Hz |
| Variable frequency drive (VFD) | Siemens SINAMICS V20 |
| Drive communication interface | RS485; USS and Modbus RTU |
| Mechanical connection | Coupling and bell housing |
| Inlet connection after the specified adapter | G3/4 male thread |
| Outlet connection after the specified adapter | G3/8 male thread |
For your enquiry, we confirm the required flow, pressure, motor and connections together. The Rohre engineering resource center is an entry point for the supporting pump information.
Case 2: matching three flow ranges at 7 MPa
For this semiconductor application, the customer specified 7 MPa, frequent starts and stops, and three flow ranges. We supplied HPU 2.0, HPU 4.0 and HPU 10 to match those requirements.
All three selected models have a maximum outlet pressure of 10 MPa, so the customer’s 7 MPa operating pressure is within their pressure rating.
The table pairs each customer-required flow range with the selected pump and its specified flow at different speeds. Pump output figures are at 10 MPa; all flow values are in L/min.
| Customer-required flow (L/min) | Selected pump | Flow at 1000 rpm | Flow at 1500 rpm | Flow at 1800 rpm | Flow at maximum speed 3000rpm |
|---|---|---|---|---|---|
| 0.83–3.4 | HPU 2.0 | 0.7 | 1.7 | 2.25 | 3.45 |
| 3.0–10 | HPU 4.0 | 3.0 | 5.0 | 6.05 | 10.15 |
| 8–20 | HPU 10 | 7.6 | 12.6 | 18.15 | 20.15 |
For HPU 2.0, the specified output at 10 MPa increases from 0.7 L/min at 1000 rpm to 3.45 L/min at 3000 rpm. The operating speed for the customer’s required flow is selected at the application pressure of 7 MPa.
For applications with frequent starts and stops, the number of starts per hour and the running and stopped periods are also part of the pump, motor and drive selection.
Case 3: HPU pumps for a long-term customer’s wafer-cleaning machines
A long-term customer in semiconductor equipment manufacturing began using Rohre HPU high-pressure ultrapure water pumps in its wafer-cleaning machines in 2025. The customer manufactures polishing equipment and was looking for a more economical pump sourcing option to address cost pressure.
The adoption of HPU pumps has become part of our ongoing cooperation with this equipment manufacturer. For buyers with similar cost concerns, we quote against the specified pump duty and supply scope, with the pump, motor, drive and connection accessories identified as applicable. This gives the purchasing team a clear basis for comparing the proposed configuration, price and delivery.
Checking an HPU alternative to an existing Danfoss pump
Danfoss offers its PAHT range for deionized and ultrapure water applications. For an HPU alternative enquiry, send us the full model and product code of your existing pump, along with the flow and pressure you require.
We use the following information to check the proposed pump and any components you want to retain.
| Information you provide | What we check for the HPU proposal |
|---|---|
| Existing pump model and required flow and pressure | HPU model and pump performance at the requested duty |
| Existing motor nameplate and rated speed, if retained | Motor suitability, pump speed and coupling requirements |
| Pump and mounting drawings | Shaft, mounting pilot, bell housing and available space |
| Inlet and outlet connections | Pump ports and any required adapters |
| Water specification and material requirements | Wetted materials and seals for the proposed pump configuration |
| Pump operating mode and drive requirements | Motor and VFD configuration, including any specified start-stop duty |
We confirm mechanical compatibility from the drawings and hydraulic suitability from the required duty. A proposed replacement should identify the pump model and any changes to the motor connection or adapters, so you can see what the quotation includes.
HPU technical parameters for OEM selection
The maximum outlet pressure is 100 barg (10 MPa) for the models below except HPU 50, which is listed at 80 barg (8 MPa). We check your required operating pressure against the limit for the selected model.
Flow figures for HPU 2.0 through HPU 32 are listed at 10 MPa. Figures for HPU 50 through HPU 90 are listed at 8 MPa. Each flow value applies at its stated pressure and speed. A duty at 7 MPa needs the corresponding pump performance data.
In these tables, barg means gauge pressure; 10 bar equals 1 MPa, and 1 L/min equals 60 L/h. Housing material describes the housing only. The complete wetted-material specification belongs to the selected configuration.
HPU 2.0, HPU 3.2, HPU 4.0, HPU 6.3, HPU 10 and HPU 12.5
| Parameter | HPU 2.0 | HPU 3.2 | HPU 4.0 | HPU 6.3 | HPU 10 | HPU 12.5 |
|---|---|---|---|---|---|---|
| Product code | 010200392 | 010200393 | 010200394 | 010200395 | 010200401 | 010200402 |
| Geometric displacement (cm³/rev) | 2 | 3.2 | 4 | 6.3 | 10 | 12.5 |
| Housing material | 304 | 304 | 304 | 304 | 304 | 304 |
| Minimum outlet pressure (barg) | 10 | 10 | 10 | 10 | 10 | 10 |
| Maximum outlet pressure (barg) | 100 | 100 | 100 | 100 | 100 | 100 |
| Continuous inlet pressure (barg) | 0–4 | 0–4 | 0–4 | 0–4 | 0–4 | 0–4 |
| Minimum continuous speed (rpm) | 1000 | 1000 | 1000 | 1000 | 1000 | 1000 |
| Maximum speed (rpm) | 3000 | 3000 | 3000 | 3000 | 2400 | 2400 |
| Flow at 10 MPa, 1000 rpm (L/min) | 0.7 | 2.0 | 3.0 | 5.5 | 7.6 | 10.2 |
| Flow at 10 MPa, 1500 rpm (L/min) | 1.7 | 3.6 | 5.0 | 8.6 | 12.6 | 16.5 |
| Flow at 10 MPa, 1800 rpm (L/min) | 2.25 | 4.54 | 6.05 | 10.2 | — | — |
| Flow at 10 MPa, maximum speed (L/min) | 3.45 | 7.56 | 10.15 | 18.06 | 20.15 | 26.4 |
| Listed power consumption at 10 MPa, 1500 rpm (kW) | 0.75 | 1.1 | 1.5 | 2.2 | 4.0 | 5.5 |
| Minimum water temperature (°C) | 2 | 2 | 2 | 2 | 2 | 2 |
| Maximum water temperature (°C) | 50 | 50 | 50 | 50 | 50 | 50 |
| Mechanical efficiency | 0.8 | 0.8 | 0.8 | 0.8 | 0.9 | 0.9 |
| Listed sound pressure level (dB(A)) | 76 | 76 | 76 | 76 | 76 | 76 |
| Pump weight (kg) | 4.5 | 4.5 | 4.5 | 4.5 | 7.6 | 7.6 |
| Integrated flushing valve | No | No | No | No | No | No |
HPU 20, HPU 25 and HPU 32
| Parameter | HPU 20 | HPU 25 | HPU 32 |
|---|---|---|---|
| Product code | 010200403 | 010200404 | 010200405 |
| Geometric displacement (cm³/rev) | 20 | 25 | 32 |
| Housing material | 316 | 316 | 316 |
| Minimum outlet pressure (barg) | 30 | 30 | 30 |
| Maximum outlet pressure (barg) | 100 | 100 | 100 |
| Continuous inlet pressure (barg) | 0–4 | 0–4 | 0–4 |
| Minimum continuous speed (rpm) | 1000 | 1000 | 1000 |
| Maximum speed (rpm) | 2400 | 2400 | 2400 |
| Flow at 10 MPa, 1000 rpm (L/min) | 16.9 | 20.6 | 28.0 |
| Flow at 10 MPa, 1500 rpm (L/min) | 27.0 | 33.2 | 44.2 |
| Flow at 10 MPa, 1800 rpm (L/min) | 32.5 | 40.0 | 52.9 |
| Flow at 10 MPa, maximum speed (L/min) | 44.2 | 55.8 | 72.6 |
| Listed power consumption at 10 MPa, 1500 rpm (kW) | 5.5 | 11 | 15 |
| Minimum water temperature (°C) | 2 | 2 | 2 |
| Maximum water temperature (°C) | 50 | 50 | 50 |
| Mechanical efficiency | 0.95 | 0.95 | 0.95 |
| Listed sound pressure level (dB(A)) | 79 | 79 | 79 |
| Pump weight (kg) | 14.8 | 14.8 | 14.8 |
| Integrated flushing valve | No | No | No |
HPU 50, HPU 70, HPU 80 and HPU 90
| Parameter | HPU 50 | HPU 70 | HPU 80 | HPU 90 |
|---|---|---|---|---|
| Product code | 010200406 | 010200408 | 010200409 | 010200410 |
| Geometric displacement (cm³/rev) | 50 | 70 | 80 | 90 |
| Housing material | 316 | 316 | 316 | 316 |
| Minimum outlet pressure (barg) | 30 | 30 | 30 | 30 |
| Maximum outlet pressure (barg) | 80 | 100 | 100 | 100 |
| Continuous inlet pressure (barg) | 0–5 | 0–5 | 0–5 | 0–5 |
| Minimum continuous speed (rpm) | 1000 | 1000 | 1000 | 1000 |
| Maximum speed (rpm) | 1800 | 1800 | 1800 | 1800 |
| Flow at 8 MPa, 1000 rpm (L/min) | 43.6 | 57.6 | 68.2 | 77.5 |
| Flow at 8 MPa, 1500 rpm (L/min) | 68.6 | 92.8 | 108.5 | 122.5 |
| Flow at 8 MPa, 1800 rpm / maximum speed (L/min) | 82.0 | 112.0 | 130.5 | 147.0 |
| Listed power consumption at 8 MPa, 1500 rpm (kW) | 11 | 30 | 37 | 45 |
| Minimum water temperature (°C) | 2 | 2 | 2 | 2 |
| Maximum water temperature (°C) | 50 | 50 | 50 | 50 |
| Mechanical efficiency | 0.95 | 0.95 | 0.95 | 0.95 |
| Listed sound pressure level (dB(A)) | 80 | 80 | 80 | 80 |
| Pump weight (kg) | 33 | 33 | 33 | 33 |
| Integrated flushing valve | No | No | No | No |
Power-consumption values apply at the stated pressure and speed. For a motor-driven package, we confirm the motor rating against your operating requirements.
Sound-pressure reference: LpA at 1 m, motor-driven pump at maximum operating pressure and speed, EN ISO 3744:2010.
HPU installation interfaces and reference dimensions
Send us the existing pump drawing if you want to retain the motor, coupling or pipe connections. We compare the ports, shaft and mounting dimensions with the selected HPU model. The tables below summarize the HPU installation drawings.
| Interface | HPU 2.0–HPU 6.3 | HPU 10–HPU 12.5 | HPU 20–HPU 32 | HPU 50–HPU 90 |
|---|---|---|---|---|
| Inlet port (T) | G1/2 | G3/4 | G1-1/4 | G1-1/2 |
| Outlet port (P) | G1/4 | G3/4 | G3/4 | G1 |
| Bleed screw / connection designation | M5 × 8 | M5 × 12 | M6 × 10 | G1/8 |
| Parallel key, as listed (mm) | 5 × 5 × 20 | 5 × 5 × 20 | 8 × 7 × 32 | 10 × 8 × 45 |
| Key standard listed on drawing | DIN 6885 | DIN 6885 | DIN 6885 | DIN 6885 |
The table gives pump-body port sizes. Package quotations specify any adapters supplied and the resulting connections.
Main dimensional references
Dimensions are nominal values in millimetres. Refer to the model drawing for fit tolerances, mounting-hole positions and coupling or bell-housing design.
| Dimension (mm) | HPU 2.0–HPU 6.3 | HPU 10–HPU 12.5 | HPU 20–HPU 32 | HPU 50–HPU 90 |
|---|---|---|---|---|
| Shaft diameter (nominal) | 15.98 | 16 | 25 | 31.99 |
| Mounting pilot diameter (nominal) | 62.98 | 63 | 100 | 124.97 |
| Shaft projection dimension shown | 34.65 | 35.50 | 51.10 | 68 |
| Axial body-length dimension shown | 133.40 | 164 | 210 | 271 |
| Mounting flange thickness shown | 9 | 8 | 7 | 7.50 |
For a complete pump package, we also need to confirm the motor, bell housing, coupling and adapters. Final interchangeability is checked against the drawings for both assemblies.
Water and material requirements for the pump
Please send the water specification and any required wetted-material or seal restrictions with your enquiry. We also need the water temperature and available pressure at the pump inlet to check the selected model’s operating conditions.
The HPU 12.5 project above specifies an SS304 pump body and 2507 flow-contacting components. For your pump, we confirm the wetted materials and seals against the water specification and material requirements you provide.
For installation and service requirements, use the Rohre installation, operation and maintenance information together with the instructions applicable to the selected HPU model.
A quotation that matches what you need to buy
If pump price or lead time is prompting you to consider a Danfoss alternative, tell us the quantity, requested delivery date and components you need. We can quote the HPU pump alone or discuss a package with the motor, VFD, coupling, bell housing and adapters.
If you plan to retain your existing motor or drive, include those details at the start. We can then check the proposed supply and identify the parts that need to change. Trial quantities, production quantities and spares should be listed separately so the quotation and delivery schedule are clear.
Pump data for your evaluation
When comparing pump performance, read flow, pressure and speed as one operating point. Inlet pressure and water temperature also belong with the test conditions. If your purchase requires particular pump tests or water-quality reports, tell us the acceptance requirements so we can confirm the available evidence and any additional work before quotation.
We use imported precision lapping equipment to control the spherical geometry and surface finish of the ball ends in our piston–slipper assemblies. Careful machining of these mating surfaces supports consistent assembly quality and reliable pump operation.
Send us your pump requirements
You can start with the flow and operating pressure you need. For a more complete selection, please include:
- The existing pump model, product code or nameplate photograph, if replacing a pump.
- Required flow and pressure, including any different operating points already specified.
- Water specification, temperature, inlet pressure and material requirements.
- Continuous or intermittent operation, including motor start-stop requirements where applicable.
- Existing motor speed and mounting details if you supply the motor; required electrical supply if we supply it.
- Required pump or package components, quantity and requested delivery date.
Use the Rohre pump selection form or send the information to our technical team. We will review the requirements with you and work out the HPU model and configuration for quotation.
